Resistivity Measurement Innovation
Tighter UPW Control for Greater Wafer Yield
プログラム概要
- Critical water analytics for ultrapure water
- The need for improved resistivity sensor accuracy
- New innovation in resistivity measurement
High-accuracy resistivity sensor for the semiconductor industry
Despite its very high purity, the ultrapure water (UPW) used in semiconductor manufacturing still contains trace levels of common metals and other electro-analytically detectable species that can negatively affect wafer yield.
Resistivity measurement provides a cumulative measurement of these ions and is often used as the primary means of detecting ion impurity trends.
With linewidths now in the single nanometer range, the effect of impurities on wafer yield is magnified. As a result, accurate, real-time monitoring of water resistivity at points-of-use is more critical than ever.
Through close collaboration with industry partners, METTLER TOLEDO has improved temperature compensation, signal stability, and environmental isolation to provide the most accurate temperature-compensated resistivity measurement possible.
Join this live webinar and find out how you can increase wafer yield in your fab.
The talk will be followed by a Q&A session with the presenter.
Who should attend:
Utilities Managers, Process Engineers, UPW Managers, Facilities Managers
Speakers
Joel Kenyon
Global Product Manager Conductivity & Transmitters
Joel is a biologist by education and has spent the last 12 years in product management for industrial analytical equipment. For four years, Joel has been the Global Product Manager for conductivity/resistivity sensors and transmitters for METTLER TOLEDO Thornton.
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