In-line Measurement Solutions for UPW in Semiconductor Fabs

Semiconductor ultrapure water requirements for resistivity and total organic carbon (TOC) are more stringent than corresponding parameters in any other industry. Substrate damage may be caused by organics or other contaminants, leading to reduced production yields. Accurate, fast and convenient measurement can save millions of dollars in lost product.

Mettler-Toledo Thornton has in-depth knowledge of the critical measurements needed for semiconductor processing and ultrapure water production. Thornton instruments  for resistivity/conductivity, TOC, pH, ORP, dissolved oxygen and dissolved ozone are specified in the majority of semiconductor manufacturing facilities  worldwide to monitor and control UPW systems.

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