Resistivity Measurement with Digital Sensors

Resistivity measurement, the inverse of conductivity, is the most critical parameter to monitor in the microelectronics industry in order to maintain ultrapure water quality. Highly stable resistivity measurement is necessary for semiconductor fabricators to produce high quality products.

To improve their processes and final product, a major North American semiconductor fabrication plant was looking for a resistivity measurement system to meet their high expectations. In partnership with METTLER TOLEDO, the fabricator tested the UPW UniCond^® system for resistivity measurement in their ultrapure water system for several weeks. After analyzing the results of the test in their water loop, the fabrication plant observed a dramatic enhancement in resistivity measurement performance compared to their previous product solution. They opted to update their strategy and specify the UPW UniCond sensor in new plants and facility upgrades. The resistivity measurements obtained exceeded all expectations, with stability and accuracy beyond the capabilities of any other resistivity sensor on the market.

This case study covers the following:

• The background of the customer situation
• Evaluation of the test setup for resistivity measurement
• Assessment of the results