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METTLER TOLEDO Process Analytics offers industry-leading solutions for critical measurement parameters, ensuring regulatory compliance and unparalleled accuracy in UPW for microelectronics. Here’s how our portfolio can help you:
Monitor On-line UPW to Achieve Sustainability Goals
Is your semiconductor facility looking for ways to improve sustainability for wafer manufacturing and water reclaim?
This video highlights the importance of monitoring conductivity, TOC, and microbial levels to catch impurities that can cause rejected wafers and ensure water purity to increase wafer quality and yield. This video also discusses monitoring TOC, pH, and dissolved oxygen in waste streams to maximize water recovery.
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UPW UniCond™
UPW UniCond™ is an industry-leading resistivity sensor that offers unparalleled temperature-compensated accuracy, significant noise reduction, and robust construction, minimizing environmental effects. Additionally, UPW UniCond™ delivers precise and dependable measurements for the quality and purity of liquids used in production.
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6000TOCi
The 6000TOCi sensor detects organic contaminants in water at sub-ppb levels. It has high sensitivity and real-time monitoring of TOC levels, and a DLI function for proactive maintenance planning. The 6000TOCi is also water-efficient, helping to meet industry demands for reduced water usage.
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7000RMS
The 7000RMS allows for real-time monitoring of ultrapure water microbial levels and reducing the need for frequent plate count testing. With the 7000RMS, energy and resources are saved while biohazard waste is minimized, ultimately improving manufacturing efficiency and maintaining high yields.
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2850Si Analyzer
With its high-performance sensors and wide measurement range, the 2850Si Analyzer ensures absolute ultrapure water and silica levels, reducing defects and increasing wafer yield. It is a fast, non-destructive tool for online quality control, with low maintenance that streamlines production processes and increases measurement confidence.
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InPro2000i
The InPro2000i pH sensor is known for its precision, dependability, and resilience. Its reference system eliminates junction potential, resulting in accurate and stable measurements. With advanced technology and durable design, the sensor delivers consistent and enduring performance, thereby reducing maintenance and downtime.
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pureO3
The pureO3 sensor with ISM helps monitor and control dissolved ozone in ultrapure water systems, ensuring effective sanitization in microelectronics manufacturing. It offers cost-saving features like pre-calibration, advanced sensor diagnostics, and fast-responding measurement to maximize production yield, reduce operational costs, and simplify sensor handling.
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Optical DO Sensor
The Optical DO Sensor measures dissolved oxygen levels in ultrapure water. Using fluorescence quenching, it detects at low levels with fast response and minimal maintenance. It is globally recognized for its reliability, high availability, and accurate measurements, particularly in semiconductor fabs.