Water Sustainability Trends in MicroE
Key Analytical Measurements to Increase Yield
Program Overview
- Total Organic Carbon control to ensure detection of sub-ppb organics and prevent bacterial contamination.
- Resistivity to monitor the ionic UPW quality and its quality in the RCA process and other SEMI tools.
- Dissolved oxygen and its monitoring and control in UPW.
- pH control as a critical parameter to the CMP process and HF, ammonia waste neutralization Recommendations for segregation of reclaim/reuse/recycle streams.
The Role and Importance of UPW Measurements.
Semiconductor FABS are the largest industrial user of pure and ultrapure water (UPW), which are vital to quality and yield in the production of wafers and integrated circuits.
Today's industry is challenged to produce more accurate measurements and higher-quality UPW, as well as reduce the volume of water and energy used in production; along with maintaining a focus on water reclaim, reuse, recycle.
With demand for semiconductors continuing to grow and rapid advancements in the industry, critical analytical parameters required for the production of UPW for improved process control and knowledge on how to use these measurements for maximum output are key.
Speakers
Jim Cannon
Head of OEM & Markets, METTLER TOLEDO Thornton
After receiving a B.S. in Biology, he continued with graduate degrees in Microbiology and in Biophysics, and an MBA in Marketing and International Management. Mr. Cannon has over 40 years of experience in the management, design and development of ultrapure water treatment and technology. This includes measuring differential conductivity and UV oxidation for the detection of TOC in UPW and the design and commercialization of Electrodeionization modules. Mr. Cannon is currently involved in the standards and regulatory organizations for the Semiconductor, Photovoltaic and Pharmaceutical markets, including the facilities and liquids committee, Reclaim/Reuse/Recycle Task Force and the UPW task Force. He has also been intimately involved in the development and the commercialization of alternative online microbial detection technology.
