Low-ppb level silica is vital in the production of microelectronics, but the frequent maintenance common to most silica analyzers can be frustrating. For a US manufacturer, switching to METTLER TOLEDO’s 2850Si has reduced maintenance and is providing greater confidence in UPW quality.
If silica is present in ultrapure water, water drops that will dry on silicon wafers can lead to reduced film adhesion, contact resistance, and therefore defects and reduced wafer yield.
This case study looks at why this leading microelectronics manufacturer selected a METTLER TOLEDO silica analyzer for monitoring low-ppb silica levels in its ultrapure water system.
Silica is in all water supplies and requires membrane separation and/or ion exchange for its removal. Out-of-spec silica levels at resin columns or elsewhere, results in product delays and lost earnings while the source of the contamination is found and remediated. To minimize these issues, the amount of silica in ultrapure water has to be continuously monitored at the proper locations and controlled at sub-ppb levels.
Direct, continuous silica measurement is the most effective means to protect against contamination from silica being released from anion resin as it nears exhaustion. Silica has negligible conductivity and therefore cannot be detected using resistivity measurements at the levels required for proper control of UPW purification systems.
The METTLER TOLEDO 2850Si silica analyzer is a compact instrument that delivers reliable low-ppb silica measurements with minimal operator supervision.
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