The microelectronics industry requires very large quantities of ultrapure water in production processes. Cleaning, rinsing and etching of wafers and substrates consumes thousands of cubic meters of UPW per day in a typical fab. Process analytical measurements are key to optimizing water usage and maximizing recovery and reuse.
Mettler-Toledo Thornton offers an extensive range of analytical instrumentation specially designed for use in the most demanding UPW and microelectronics processing applications. We provide superior solutions for monitoring resistivity/conductivity, TOC, pH, ORP, dissolved oxygen and dissolved ozone to increase the volume of water recovered, limit discharge and reduce processing costs. Learn more about our in-line measurement solutions, featuring the unique Intelligent Sensor Management (ISM™) concept.
Mettler-Toledo Thornton offers an extensive range of analytical instrumentation specially designed for use in the most demanding UPW and microelectronics processing applications. We provide superior solutions for monitoring resistivity/conductivity, TOC, pH, ORP, dissolved oxygen and dissolved ozone to increase the volume of water recovered, limit discharge and reduce processing costs. Learn more about our in-line measurement solutions, featuring the unique Intelligent Sensor Management (ISM™) concept.
Semiconductor Ultrapure water is the most voracious and aggressive solvent employed by the semiconductor industry in the production and cleaning of wafers. For efficient operation and to meet the most stringent requirements, analytical process control of UPW system is of utmost importance. | Flat Panel Display Flat panel display manufacturing has very strict tolerances for ionic and organic contamination in pure and ultrapure water systems. Measuring these contaminants in their UPW systems enables flat panel manufacturers to improve product quality and maximize yields. | Photovoltaic Photovoltaic cell manufacturing requires an exceptionally clean wafer surface which must be cleaned and rinsed extensively with ultrapure water. Ionic salts or organic contaminants can negatively affect cell efficiency, and must be continuously monitored. | ||
| Read more | Read more | Read more | ||
Download Center Download one of our newsletters or brochure to help you find the right answer to your troublesome processes. | Products and Solutions Our extensive product range features solutions for the most demanding microelectronics applications. | Intelligent Sensor Management The Intelligent Sensor Management (ISM) platform is a groundbreaking maintenance concept that simplifies sensor handling, enhances reliability and reduces sensor life-cycle costs. | ||