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Domov Strokovna knjižnica Case Study: Precision Weighing in CMP Slurry Production

Case Study: Precision Weighing in CMP Slurry Production

Achieve precise, repeatable results in slurry formulation and mixing processes

Chemical Mechanical Planarization (CMP) is a critical step in semiconductor manufacturing. Precise weighing results in the slurry process impact wafer quality and help to make transistors smaller to develop the next generation of chips.

In this case, a leading producer of semiconductor chips in Asia sought higher precision in its CMP formulation process with a fully integrated, high-precision solution.

Download the case study to discover how they benefit from improved accuracy and automation.

Keep up with Growing Demand

Keep Up with Growing Demand

The global demand for semiconductors is rising as more and more microchips are used in electronic equipment, and they need to be produced to very specific requirements to deliver the expected performance. 

For this reason, this semiconductor company required a precise slurry formulation and mixing process. The production managers requested a fully integrated, high-precision solution that can handle tanks with capacities up to 300 kg and deliver a repeatable resolution of less than 5 g.

Learn more about the application and how they selected a solution to fulfill their requirements by downloading your free copy of the case study above.

Achieve Consistent Quality and Reduce Costs

Achieve Consistent Quality and Reduce Costs

Ensuring that you are using the right weighing equipment is the critical first step for reproducible processes in semiconductor production.  You need to...

  • Select equipment appropriate to your process tolerances
  • Understand and weigh according to defined risks
  • Avoid compliance costs and expensive rework
  • Reduce waste of raw materials and production resources

METTLER TOLEDO Service offers support and certificates to help you achieve all of the above objectives so that you can be confident in your production quality and reduce costs.