A resistivity sensor is an analytical instrument designed for monitoring resistivity in ultrapure water (UPW) used in microelectronics and semiconductor manufacturing. Resistivity is the reciprocal measure of conductivity, and quantifies how strongly a given material opposes the flow of electrical current. Resistivity analyzers provide a critical measurement to ensure that water used in electronics manufacturing does not carry ions that can damage the product during production.
Selecting the right conductivity and resistivity sensor for pure and ultrapure waters can be a challenge. This video explains some of the most common challenges. It addresses how the UniCond digital conductivity and resistivity sensors from METTLER TOLEDO eliminate these challenges. The sensors make conductivity monitoring accurate, easy, and efficient.
The UniCond family of resistivity sensors use an advanced, built-in measurement circuit to provide exceptional accuracy and reduce the risk of interference.
METTLER TOLEDO resistivity sensors are trusted globally by semi fabs to help maintain their UPW systems and prevent water system problems that could negatively affect production yield.
Resistivity sensors with Intelligent Sensor Management (ISM) store calibration data and other sensor information in the sensor to enable fast, plug and measure start-up.
ISM resistivity sensors provide sensor diagnostics that identify out-of-spec performance with your resistivity sensor to improve process control.
With constantly narrowing linewidths, METTLER TOLEDO resistivity sensors meet the challenging UPW standards with accurate and stable measurements.
Our organization specializes in providing precision instrument equipment and related services to industrial customers. In 2016, METTLER TOLEDO generated revenues of over US$ 2.5 billion. The company’s stock is publicly traded on the New York Stock Exchange. Read more
As semiconductor chip wafer size increases and line width narrows, the demands on the quality of ultrapure water continue to grow. Determining water purity is achievable with resistivity sensors that operate dependably in exceptionally pure water – a challenge in itself. Read more
Resistivity instrumentation has served the water purification industry well for many years. A few years ago, as a result of the reliability and endu- rance of this measurement, resistivity instrumentation was almost taken for granted when designing new water systems. It was not uncommon for resistivity instruments to be completely overlooked during the annual (or biannual) plant maintenance programs. Read more
Resistivity measurement, the inverse of conductivity, is the most critical parameter to monitor in the microelectronics industry in order to maintain ultrapure water quality. Highly stable resistivity measurement is necessary for semiconductor fabricators to produce high quality products. Read more
The semiconductor industry is advancing rapidly with an increased demand for more chips per wafer and narrower linewidths in the single digit nanometer range. In order to meet these challenges, ultrapure water (UPW) monitoring and control must be implemented to detect ionic impurities that could negatively impact wafer yield. Read more
Electrical resistivity is the reciprocal of conductivity. Resistivity is the intrinsic property that quantifies how strongly a given material opposes the flow of electric current.
A resistivity sensor is an in-line sensor that provides a continuous measurement of resistivity in a water system. This measurement is often used in electronics manufacturing to monitor and control the purity of ultrapure water (UPW). METTLER TOLEDO resistivity sensors and probes are specially designed to measure accurately in low conductivity waters.
Resistivity sensors can integrate with any appropriate METTLER TOLEDO water transmitter that is suitable for conductivity or resistivity. These resistivity and conductivity transmitters include the M200, M300 Water and M800 Water transmitters. The exact transmitter for your application should be selected in consultation with your local METTLER TOLEDO representative.