 |
This application note explores the importance of reliable, real-time TOC analysis in semiconductor UPW. Ultrapure water is the most voracious and aggressive solvent employed by the microelectronics industry in the cleaning and production of wafers. During the past four decades the electronics industry has exponentially increased the number of circuits that are etched onto silicon chips. The increase in the number of circuits has significantly decreased the line-widths, thereby increasing by magnitudes the requirements for accurate and continuous measurement of TOC in UPW.
Semiconductor manufacturing processes have some of the most stringent specifications for ionic and organic contamination in pure and ultrapure water systems. Measuring TOC of semiconductor water has enabled manufacturers to improve product quality and maximize yields. Advances in water purification technology and innovations in instrumentation for monitoring these contaminants have played a significant role in improving and measuring the quality of ultrapure water. These advances, in turn, have driven specifications lower for all contaminant levels in UPW systems.
Total organic carbon / TOC analysis in semiconductor UPW is a powerful method for monitoring organic contaminants in ultrapure water and the ‘health’ of UPW systems used in the microelectronics industry. Organics provide a food source for any bacteria that may exist in the distribution system, storage tanks, and the process technology or treatment modules. Accurate, fast and convenient measurement of the organics level in a UPW system can save millions of dollars by preventing lost product.
The 6000TOCi sensor and M800 transmitter provide the performance needed to meet these requirements, while offering the added benefits of continuous on-line measurement in a low-maintenance, industrial package with proven multi-parameter technology. The 6000TOCi sensor interfaces directly with the M800 transmitter, which provides additional measurement parameter capability. The 6000TOCi Sensor with M800 transmitter is equipped with METTLER TOLEDO’s Intelligent Sensor Management (ISM) system. ISM advanced diagnostics help ensure your sensor performs optimally at all times.
Read more about the 6000TOCi sensor and M800 transmitter and how it can be used for analysis of TOC in UPW by reading the application note and by visiting the below:
- 6000TOCi Sensor – High-performance total organic carbon sensor that can monitor TOC of semiconductor water with real-time measurement and stable, accurate analysis. Water efficient sensor with verifiable system performance.
- M800 Transmitter – Multi-parameter transmitter that can accept three other analytical sensors in addition to TOC, including conductivity, pH, ORP, or dissolved oxygen[SST1] , plus pressure, tank level or two flow sensors.
- Intelligent Sensor Management (ISM) – Digital sensor technology that ensures predictable maintenance, simple sensor handling, and efficient production.
.png/_jcr_content/renditions/cq5dam.web.1280.1280.png "Transmitters")
.png/_jcr_content/renditions/cq5dam.web.1280.1280.png "In-Line pH Probe / ORP (Redox) Probe")
