Effective water cycle management is crucial in semiconductor manufacturing due to the extensive use of ultrapure water (UPW) in various processes. The semiconductor industry is the largest consumer of UPW globally, necessitating rigorous protocols to manage and recycle this resource efficiently.
METTLER TOLEDO Thornton instrumentation monitors all stages of water purification in-line, while METTLER TOLEDO laboratory instruments are ideal for punctual water quality checks in the laboratory and at-line applications.
The water cycle in semiconductor manufacturing begins with raw water (1) being brought to the facility, where it undergoes pre-treatment (2), makeup, and polishing (3) stages. Once polished, the UPW is distributed to the fabrication plant (4 - Fab), where it is used in multiple tools and processes, such as cleaning, etching, and chemical mechanical planarization (CMP). Post-use, the water is often reclaimed (5) for recycling within the UPW loop, used in other applications like boilers and scrubbers (11), or treated as waste (6) based on its contamination levels.
Resistivity and Total Organic Carbon (TOC) are essential for monitoring UPW quality. For instance, the resistivity should not be less than 18.18 mega ohm per centimeter at 25° C, and TOC levels should be kept below 1 part per billion (ppb).
Dissolved oxygen (DO) is critical for preventing contamination. The optical DO sensors from Thornton offer long service lives and require minimal maintenance, making them ideal for maintaining low levels of dissolved oxygen.
pH and Conductivity are key in waste neutralization processes, especially when dealing with harmful chemicals like hydrofluoric acid or ammonia. Using the right pH sensors ensures safe disposal and compliance with environmental regulations.
Silica and sodium monitoring helps maintain the health of mixed-bed or electrodeionization stacks, which are pivotal for water purification.
Organic Compounds Monitoring organic contaminants in ultrapure water used in semiconductor fabs. UV/Vis spectrophotometry can detect trace organic compounds by measuring the absorbance spectrum, ensuring that the water meets high purity standards.
Heavy metals analysis measures the absorbance of specific contaminants, ensuring that wastewater treatment processes are effective and compliant with environmental regulations.
The semiconductor industry is increasingly focused on reducing its water footprint. Legislation in various regions mandates high levels of water reuse and reclamation, often up to 90%. Effective segregation and treatment of waste streams, such as neutralizing hydrofluoric acid and converting ammonia for safe discharge, are critical steps in this process.
Effective water cycle management in semiconductor manufacturing is not only about ensuring the highest quality of UPW but also about sustaining environmental responsibility. By employing advanced sensor technology and adhering to rigorous monitoring and maintenance protocols, semiconductor facilities can optimize their water use, ensure compliance with regulatory standards, and contribute to environmental sustainability.
METTLER TOLEDO Thornton provides a comprehensive portfolio of sensors and analyzers, including pH, conductivity, resistivity, TOC, dissolved oxygen, microbial detection, and silica sensors. These instruments are integral in maintaining the highest quality UPW. ISM (Intelligent Sensor Management) technology offers predictive diagnostics, adaptive calibration, and maintenance alerts, enhancing operational efficiency and reducing downtime.
Offline water analyses performed punctually help verify the accuracy of the online monitoring system, with applications for benchtop instruments such as density, refractive index, pH, conductivity, ions and dissolved oxygen (DO), titration, and UV/Vis measurements.
We understand that precision and reliability are essential in your work, and our solutions are designed to support you every step of the way. Our team is dedicated to keeping your equipment running smoothly so you can focus on what matters most—achieving groundbreaking results. Let’s work together to enhance your efforts and drive innovation in the semiconductor field.
