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As water becomes more and more of a precious commodity, maximizing its use and recovery in microelectronics is critical. Efficient water reclaim in microelectronics requires judicious use of on-line water analytics.
This white paper looks at the importance of water reclaim and reuse, and water reclaim strategies. It considers how some fabs are achieving up to 85% reclaim.
Total organic carbon (TOC) and conductivity/resistivity measurements are critical for efficient water reclaim in microelectronics and semiconductor fabrication plants. The varying nature of the waste stream from fabrication necessitates multiple analytical measurement parameters. The inclusion of a high performance TOC analyzer is one component that is required for efficient control. A TOC analyzer allows for increased recovery of water from the process while reducing water to discharge.
Conductivity or resistivity measurements in post-process water are vital in almost all stages of water reclaim in microelectronics. During wastewater treatment, either 4-electrode or inductive conductivity sensors are used to monitor high conductivity waste streams. These assist in the segregation process and determine if waste has been sufficiently treated for discharge.
.png/_jcr_content/renditions/cq5dam.web.1280.1280.png "电导率传感器/电阻率传感器")
.png/_jcr_content/renditions/cq5dam.web.1280.1280.png "在线pH探头/ORP（氧化还原）探头")